First Nano, a Division of CVD Equipment Corporation, manufactures turnkey thermal CVD and PECVD systems to meet the research and production needs in nanotechnology, solar, semiconductor and MEMS industries.
Our EasyTube™ systems, used for nanomaterial growth, include:
EasyTube™ systems are also used in thin film deposition including Silicon Germanium (SiGe), amorphous Silicon, micro-crystalline Silicon, graphene, Silicon Oxide, Silicon Nitride, TCO coating on glass and much more.
We provide turnkey solutions with our EasyTube™ CVD systems, EasyGas™ cabinets, EasyPanels™, and EasyExhaust™ Gas Conditioning Systems (scrubber).
2010 MRS Spring Meeting
April 5th - 9th
San Francisco, CA
Booth #TBA
 More 2010 Tradeshows
First Nano Application Lab
Application Notes & Papers
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EasyPanel
Ultra High Purity Gas Panels...
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EasyExhaust™ System
Provides proper handling of hazardous effluents from nanotechnology,s...
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EasyGas™ 1000
Designed to cover a wide range of cylinder gas delivery applications…
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EasyGas™ 1500
Fully Automated Gas Cabinet providing the industry’s safest...
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EasyTube™ 2000
Advanced turnkey thermal catalytic CVD process tool for...
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EasyTube™ 2000 - CNT Array
Vertically Aligned CNT array...
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EasyTube™ 2000 - Fastcool™ Furnace
Three zone with cascade control provides...
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EasyTube™ 2000 - Automated Loader
Ensures contamination-free handling and...
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EasyTube™ 2000 - Hot Loader
Hot Loader to Load Sample into a Pre-Heated Chamber....
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EasyTube™ 3000
Advanced thermal chemical vapor deposition process tool for...
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EasyTube™ 3000 - RF Plasma 
Remote RF Plasma...
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EasyTube™ 3000 - CNT Batch Synthesis 
CNT Batch Synthesis...
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EasyTube™ 3000 - High Throughput Loader 
The High Throughput Loader enables fast sample heating to...
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EasyTube™ 3000 - Infrared Heating Furnace 
The optional Infrared Heating Furnace provides...
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EasyTube™ 4000 
Advanced Plasma Enhanced CVD process tool for the synthesis of...
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EasyTube™ 4000 - Deposition Chamber 
Deposition chamber...
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EasyTube™ 6000 
Offered for Carbon Nanotubes (CNT), Nanowires, Oxidation, Annealing,...
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EasyTube™ 6000 - Batch Wafer 
Utilizes a Cantilevered Loading System and has...
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Additional products
"With First Nano's EasyTube™ 3000 equipment, the research team succeeded to produce 18 millimeter long CNT array which is considered the longest aligned CNT's reported ever."
- Dr. Vesselin Shanov
The University of Cincinatti
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1/15/10
First Nano Lab mentioned in, PV-tech.org article, "Tangled up in Bloo (Solar): Start-up believes 3-D has a commercial not-too-distant future"
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12/01/09
CVD Equipment Corporation appears in the Brookhaven National Laboratory Newsletter, The Bulletin, article titled "Pushing the Envelope in Optics"
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11/24/09
CVD Equipment Corporation offers a compelling solution for TCO coated glass
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11/16/09
CVD Equipment Corporation Announces 3rd Quarter Results
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11/04/09
"Growth on the Horizon - SDC, a division of CVD Equipment Corporation, poised for Success in Growing Energy Market" -Ulster County Newsletter
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10/27/09
Brookhaven National Laboratory chooses CVD Equipment Corporation for a High Precision In-Vacuum Motion System
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10/21/09
SuperPower takes delivery of a second Reel-to-Reel MOCVD system from CVD Equipment Corporation
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