EasyExhaust™ Pyrolizer + Wet Scrubber
The EasyExhaust™ Pyrolizer + Wet Scrubber will first thermally decompose / oxidize gases in a furnace, then pass the gases through a water spray packed tower to wet scrub, remove particles and cool the exhaust gases prior to exiting the system. An optional pH monitoring system can neutralize acidic scrubbing liquid.
The FirstNano® branded gas abatement systems provide proper safety to plant and personnel in the handling of hazardous gases. We have taken extensive measures to provide fail-safe designs and combine them with forward thinking features in an effort to offer a safe, versatile product for specialty gas exhaust requirements.
- Furnace operating temperature up to 900 °C
- Digital temperature set point and readout
- Vertically mounted, inconel reaction tube with water cooled top flange
- Air flow meter for oxidation
- Dry type air pump
- Water spray packed tower exhaust
- Pressure monitor interlocks out system and sounds an audible alarm if system clogs
- Automatic PLC system control
Toxic, corrosive, flammable, explosive, and pyrophoric exhaust gasses / vapors, including:
- Diborane (B2H6
- Boron Bromide (BBr3
- Boron Trichloride (BCl3)
- Chlorine (Cl2)
- Carbon Monoxide (CO)
- Fluorine (F2)
- Germane (GeH4
- Hydrogen/Dihydrogen (H2)
- Hydrogen Bromide (HBr)
- Hydrogen Sulfide (H2S)
- Hydrogen Chloride (HCl)
- Hydrogen Flouride (HF)
- Dihydrogen Selenide (H2Se)
- Ammonia (NH3)
- Silicon Hydride (SiH4)
- Phosphine (PH3
- Phosphoryl Chloride (POCl3)
- Metalorganics:
- DEZ
- TMA
- Silicon Tetrachloride (SiCl4)
- TCS
- Hydrogencarbons:
- Methane (CH4
- Ethylene (C2H4)
- Acetylene (C2H2
| Electrical* | 208 VAC | 60 Hz | L1, L2, L3, N, G | 40 Amps |
| Dimensions | 29" Length | 29" Width | 75" Height | |
| Water | 1 GPM | 20 - 50 PSIG | ||
| Water Drain | Gravity drain | |||
| Condition Gas Exhaust | 50 SCFM | 1" WC | ||
| Cabinet Exhaust | 200 SCFM | 1" WC |
*Note:
Electrical varies with Country | Facility requirements vary with system options | Consult factory for details