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EasyGas™ 1000

EasyGas™ 1000 Gas Cabinet

EasyGas™ 1000Turnkey solution for nanomaterial synthesis
The EasyGas™ 1000 gas cabinet is designed to cover a wide range of cylinder gas delivery applications. In its simplest form, the EasyGas™ gas cabinet houses 1, 2, 3 or 4 gases, and includes a high purity, manual gas panel for each gas. Modular EasyGas™ panels are available in 1, 2, 3, 4, 5 and 6-valve designs for process and instrumentation diagrams. Each panel may be tailored to the specific gas and application.

Myriad of Automated Alarm and Panel Shutdown Options
With the addition of the optional FlexPowr™ controller, the EasyGas™ cabinet can support a myriad of automated alarm and panel shutdown options such as: auto-switchover, excess flow sensors, low cylinder pressure alarms, high delivery pressure alarms, gas leak sensors, Scales and more. The FlexPowr™ controller can support up to eight (8) user-settable alarm inputs and eight (8) user-settable alarm outputs. The EMO slam button and exhaust pressure sensor are included with the FlexPower™ controller option.

Modular Design Meets Your Exact Gas Delivery Needs
EasyGas™ 1000 makes it simple to meet your exact gas delivery needs. Our modular design concept allows you to use a building-block method to configure a gas cabinet to your specifications.

Begin by choosing one of several cylinder enclosure configurations, then proceed to the gas panel level by selecting the gas panel purity. From the standard 3-valve UHP panel, you can choose to add purge capability (4-Valve) or PURGE/EVAC capability (6-Valve).

Add safety and peace-of-mind by purchasing the optional FlexPowr™ controller and selecting which panels you want to shutdown on alarm. Fitted with a normally-closed ESO valve for automatic shutdown, the FlexPowr™ controller can support up to 4 dry-contact alarm inputs. Exhaust pressure switch, gas leak detection, and UVIR are just some of the optional controls components available to prompt shutdown.

Cylinder Cabinets:

  • 1-cyl, [1-process]
  • 2-cyl, [1-process, 1-purge]
  • 2-cyl, [2-process]*
  • 3-cyl, [3-process]*
  • 3-cyl, [2-process, 1-purge]
  • * Purge SideCar is an external, integrated purge cylinder

 

Gas Panel / Manifold Purity:

  • UHP construction: orbitally welded/VCR® 316L SS or VIM/VAR
  • UHP grade regulator (nontied diaphragm standard)
  • UHP grade diaphragm valves (20 Ra standard)

 

HP Gas Panels:

  • 3-Valve design [HP vent]
  • 4-Valve design [adds PURGE]
  • 6-Valve design [adds EVAC]

 

UHP Gas Panels:

  • 25 Ra surface finish
  • Dual stage regulators
  • Outlet filters (0.003 µm)
  • DISS cylinder fittings
  • 3-Valve process gas panel [adds HP vent, 1-Valve is standard]
  • Optional FlexPowr™ Controller
  • Automatic shutdown of process gas panels
  • Up to 8 user-definable alarms
  • Up to 8 user-definable outputs
  • Audible/visible alarm indication
  • EMO button
  • Multilevel password protection
  • CLASS 100/CLASS 10 clean room assembly and test
  • FlexPowr™ Control Components
  • Exhaust pressure switch
  • HI cylinder pressure switch
  • HI delivery pressure switch
  • Integrated gas leak detection
  • UVIR detection
  • Excess flow sensor
  • Other Equipment Options
  • Adjustable cylinder shelves
  • Restrictive flow orifices
  • Cylinder scales
  • CGA torque wrenches
  • ASME Section IX
  • SEMI® S2 Safety Guidelines for Semiconductor Manufacturing Equipment
  • NFPA® 79, 496, 70 [NEC®]
  • Factory Mutual®
  • UL®
  • CE®
Dimensions  1-cyl: 18"W x 72"H x 19"D  2-cyl: 24"W x 72"H x 19"D  3-cyl: 36"W x 72"H x 19"D
Pneumatic Supply  Adjustable to 90 psig  1 slm max.
Process Purge  Adjustable to 85 psig  30 slm max.
Vacuum Drive  Adjustable to 85 psig  85 slm max.
Process Vent  >1.0" WC  100 slm
Power  115V/3A N/A
Sprinkler (if used)  30 psig  31 gpm
Exhaust  >0.15" WC  300 scfm (2-cyl)
 >0.15" WC  450 scfm (3syl)

*Note: Electrical varies with country; facility requirements vary with system options. Consult Factory for details.

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