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EasyGas™ 1500

EasyGas™ 1500 Gas Cabinet

EasyGas™ 1500Safe & Reliable UHP Specialty Gas Equipment
The EasyGas™ 1500 fully automated gas cabinet is representative of continuous drive and commitment to providing the industry’s safest and most reliable ultra-high purity (UHP) specialty gas distribution systems available. Mass configuration and modular design concepts of the gas panels, controls architecture and cabinet enclosure have combined to widen the product configuration spectrum and greatly increase user flexibility.

From the fab to the lab to the university, FirstNano® systems sets itself apart as the clear choice for value in today’s budget - conscious environment.

The EasyGas™ 1500 makes it simple to meet your exact gas distribution needs. Our modular design concept allows for component-level replacement, ease of service and upgradeability. Begin by choosing one of several "core" gas cabinet configurations. Start right at the gas panel level with standard choices for regulator type, valve type, transducer ranges and purity level. Zero in further with a myriad of options like: integrated scales, onboard gas leak detection, purgeable splitters, RFO, filtration, purification, and many more. The SPEC √™ worksheet will walk you through this process in a simple, step-by-step manner. Our Sales Engineers are always available to work through the configuration process with you, either by phone, or in person.

  • 2-cyl, [1-process, 1-purge]
  • 2-cyl, [2-process], external purge source
  • 3 cyl, [2-process, 1-purge]
  • Independent out or autoswitchover
  • Cabinet-to-cabinet switchover

 

Standard Controls / Features:

  • PLC control of all critical functions
  • Bright 10.4" color touch screen interface
  • Proven auto-sequenced routines for all aspects of operations and maintenance
  • User settable limits for all process and alarm parameters
  • Exhaust pressure monitor
  • On-screen warnings, alarms, prompting and instructions
  • Emergency Off (EMO)
  • EMO and EGO inputs
  • Alarm outputs
  • Multi-level password protection
  • Diagnostics screen
  • Valve cycle count screen
  • Z-Purge ready for Class I Div II compliance

 

Process Panel Features:

  • Ultra-High Purity (UHP) 316L SS or VAR construction
  • Surface finish 10 Ra avg. or better
  • Springless diaphragm valves
  • Tied-diaphragm process regulator
  • Precision flow sensor
  • Vacuum assisted purging
  • UHP orbitally welded with strategic VCR® breaks
  • Helium leak tested to 1.0 x 10-9 atm*cc/s
  • CLASS 100 / CLASS 10 cleanroom assembly and testing
  • Optional FlexPowr™ Controller
  • Automatic shutdown of process gas panels
  • Up to 8 user-definable alarms
  • Up to 8 user-definable outputs
  • Audible/visible alarm indication
  • EMO button
  • Multilevel password protection
  • CLASS 100/CLASS 10 clean room assembly and testing
  • FlexPowr™ Control Components
  • Exhaust pressure switch
  • HI cylinder pressure switch
  • HI delivery pressure switch
  • Integrated gas leak detection
  • UVIR detection
  • Excess flow sensor
  • Other Equipment Options
  • Adjustable cylinder shelves
  • Restrictive flow orifices
  • Cylinder scales
  • CGA torque wrenches
  • SME Section IX
  • SEMI™ S2 Safety Guidelines for Semiconductor Manufacturing Equipment
  • NFPA® 79, 496, 70 [NEC®]
  • Factory Mutual®
  • UL®
  • CE®
Dimensions  1-cyl: 18"W x 84"H x 19"D  2-cyl: 24"W x 84"H x 19"D  3-cyl: 36"W x 84"H x 19"D
Pneumatic Supply  Adjustable to 90 psig  1 slm max.
Process Purge  Adjustable to 80 psig  30 slm max.
Vacuum Drive  Adjustable to 85 psig  85 slm max.
Process Vent  >1.0" WC  100 slm
Power  115V/3A N/A
Sprinkler (if used)  30 psig  31 gpm
Exhaust  >0.15" WC  300 scfm (2-cyl)
 >0.15" WC  450 scfm (3syl)

*Note: Electrical varies with country; facility requirements vary with system options. Consult Factory for details.

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