EasyPanel™ UHP Manual Gas Panel
Meets Safety, Process, Purity and Budgetary Goals
Our EasyPanel™ UHP manual gas panels are designed for high and low pressure, ultra-high purity (UHP) gas delivery. Typically used for non-hazardous purge and process gas delivery applications, the EasyPanel™ Series offers 1, 2, 3, 4 and 6-valve designs. The plumbing design ensures low entrapped volumes and minimized dead-legs for increased purity. The modular design concept allows the customer to tailor each system to meet their safety, process, purity and budgetary goals. The product configurations range from the simplest 1-valve design for non-hazardous use up to a 6-valve design that offers high pressure vent, low pressure vent, deep purge, and venturi assisted EVAC. MicroLine series UHP gas panels can also be fitted with a myriad of options including pressure relief, filtration, restrictive flow orifices, flexible pigtails, and more.
- 1-Valve [pre-regulator shutoff]
- 2-Valve [adds HP vent]
- 3-Valve [adds post-regulator shutoff]
- 4-Valve [adds PURGE]
- 4-Valve DP [adds DEEP PURGE PIGTAIL]
- 6-Valve [adds LP vent and EVAC]
- 10 Ra Surface Finish
- Pressure Relief
- Vent Check Valve [HP]
- Vent RFO [HP]
- Outlet filter [30 or 150 slm, 0.003 micron]
- DISS cylinder fittings
- 2 or 3-Position Outlet Splitter
Regulator Options:
- Single stage [tied-diaphragm]
- Dual stage [non-tied]
- Dual stage [tied]
- Hastelloy® Trim
- Absolute pressure regulator
- Pressure ranges [30, 60, 100, 250 psig]
Other Equipment Options:
- Pre-regulator filter [0.3 micron]
- Cylinder scales [w/LCD digital indicator]
- Cylinder scales [w/LCD digital indicator and setpoint alarm]
- CGA/DISS torque wrenches
- ESO valve
- Panel mounted solenoid for ESO Valve
- Pressure switches
- SME Section IX
- SEMI™ S2 Safety Guidelines for Semiconductor Manufacturing Equipment
- NFPA® 79, 496, 70 [NEC®]
- Factoryual®
- UL®
- CE®
| Dimensions | 10.5"W x 15.5"H | ||
| Pneumatic Supply | |||
| Process Purge | |||
| Vacuum Drive | |||
| Process Vent | |||
| Power | |||
| Sprinkler (if used) | |||
| Exhaust | |||
*Note: Electrical varies with country; facility requirements vary with system options. Consult Factory for details.